ページ1に含まれる内容の要旨
INSTRUCTION MANUAL
FOR
MODEL S-4800
FIELD EMISSION
SCANNING ELECTRON MICROSCOPE
Please read through this manual carefully
before using the instrument.
• Before using the instrument, read the safety
instructions and precautions carefully.
• Keep this manual in a safe place nearby so it
can be referred to whenever needed.
Copyright © Hitachi High-Technologies Corporation. 2002. All rights reserved. Printed in Japan. Part No. 539-8050
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NOTICE: 1. Information contained in this document is subject to change without notice for improvement. 2. This manual is copyrighted by Hitachi High-Technologies Corporation with all rights reserved. No part of this manual may be reproduced, transmitted or disclosed to a third party in any form or by any means without the express written permission of Hitachi High-Technologies Corporation. 3. Hitachi High-Technologies Corporation assumes no liability f
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FOREWORD • The S-4800 SEM utilizes electron beam accelerated at 500 V to 30 kV. APPLICATION The instrument is designed mainly for observation and evaluation of specimens prepared for observation using SEM. • Note that Hitachi High-Technologies Corporation will not be responsible for injury or damage caused by usage of the instrument in a manner not described in this manual. CAUTION The electron microscope need not conform to the “Radiation Hazard Preventive Laws” or “Ionizing Radiati
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Before using the equipment, read this instruction manual and pertinent instruction manuals of relevant accessories to assure proper operation of the equipment. Scope of Instruction Manual This instruction manual comprises the following: 1. Installation (Requirements and Items to be Prepared by User) 2. Function (Description of Controls) 3. Operation (Viewing Images, Saving Data, and Taking Photographs) 4. Maintenance (Procedures, Troubleshooting, and Action on Power Failure) 5.
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GUARANTEE Period of Guarantee The charge-free guarantee period is one year from the date of installation. Details of Guarantee (a) The instrument will be repaired free of charge if it malfunctions due to a defect in manufacture within the charge-free guarantee period. (b) Note that a substitute part may be used for repair, or replacement with an equivalent product may be made instead of repair. (c) Such system components as a personal computer and printer which are frequently
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GUARANTEE (i) Failure of instrument or damage of basic software, application software or other data due to a computer virus. (j) Failure of the PC used with the instrument or damage to basic software, application software and/or data because of momentary voltage drop caused by lightning or power interruption. (k) Failure of the PC used with the instrument or damage to basic software, application software and/or data caused by turning off the PC main power without taking the normal te
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INSTALLATION AND AFTER-SALES SERVICE Installation • Installation at delivery will be carried out by Hitachi High-Technologies Corporation installation engineers. • Before installation, refer to section 1 and prepare the necessary utilities. • Installation at another place after delivery will be provided at charge. Consult your nearest Hitachi High-Technologies Corporation service representative for details. After-sales Service • For after-sales service of the instrument, conta
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Available Training Programs Hitachi High-Technologies Corporation offers various kinds of training programs at its own facilities or at the user’s site and facilities to ensure proper and safe operations of the equipment to its full performance. Please contact your sales representative about the details of the training programs and application to them. Applicants will be charged. Handling of Chemicals (1) The user is responsible for proper handling and disposal of chemicals us
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SAFETY SUMMARY General Safety Guidelines Before operating the machine, read the following instructions carefully: • Follow all the operating procedures provided in this manual. • Installation and maintenance must be entrusted to personnel who have received training at and are authorized by Hitachi High-Technologies Corporation. • Pay special attention to and follow all the hazard warnings on the machine and in the manual. Failure to do so can cause injury to yourself or d
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SAFETY SUMMARY(cont’d) • Installation at delivery, maintenance and/or relocation must be carried out under the supervision of Hitachi-approved specialists. • The customer is responsible for proper ventilation of the room when using chemicals. Inadequate ventilation could cause a health hazard. • Maintenance up to 4.4 in section 4 must be entrusted to the service engineers (of Hitachi Instrument Service). The user should not carry out these procedures. • Do not carry out modific
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Electrical Hazard Electrical hazards exist due to the following: Electron Gun : 0.5 to 30 kV DC Ion Pump : 5 kV DC Photomultiplier : 1 kV DC Scintillator of secondary electron detector : 10 kV DC Electrode 1 : 50 V DC Electrode 2 : 200 V (Max) DC Electrode 3 : 100 V (Max) DC ExB : 30 V (Max)DC Penning gauge : 3 kV Photo CRT : 10 kV DC An enclosure is provided for each high voltage power supply sub-unit. These enclosures are fixed by screws and electrically connected to
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High Temperature Hazard Baking the electron gun part is carried out about once per 6 months to keep high vacuum inside the part. When baking, the surface of the gun housing and ion pumps reaches around 250 °C. The electron gun part is surrounded by a metal guard to prevent high temperature hazard caused by direct contact. However, the temperature of the upper stage surface rises up to 100 °C and the temperature of the side cover surface also rises up to 75 °C. The maintenance work of
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Laser light Hazard The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Personal Computer with a laser device complies with safety standards, including International Electrotechnical Commission (IEC) 825. With specific regard to the laser, the equipment complies with laser product performance standards set by US government agencies for a Class 1 laser product. The product does not emit hazardous light; the beam is totally enclosed during all modes of custom
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Fig S-1 Warning labels on the Main unit (standard version) SAFETY - 6
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Fig S-2 Warning labels on the Display unit (standard version) SAFETY - 7 Pinch
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NOTICE : (Labels with(S2) are put to SEMI-S2 guideline conforming version) Fig S-3 Warning labels on the Main unit (ANSI style labels) SAFETY - 8
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NOTICE : (Labels with(S2) are put to SEMI-S2 guideline conforming version) Fig S-3 Warning labels on the Display unit (ANSI style labels) SAFETY - 9
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WARNING • Voltages up to 100 V AC and 30 kV DC are used inside this instrument. Do not touch inside or you may receive an electric shock. • Do not remove the covers of column unit, control unit or power unit and do not touch internal parts or circuits while the instrument power is turned on. There is a hazard of fatal or serious injury due to electric shock. Beware of • Avoid removing the covers of the instrument. If they must be electric shock removed, make sure to first turn
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WARNING (cont’d) The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Be sure to observe the following warnings when operating a product equipped with a laser device. Do not try to open the unit enclosure. There are no user-serviceable components inside. Laser Light Do not operate controls, make adjustments, or perform procedures to the laser device other than those specified herein. Allow only Service persons to repair the unit. SAFETY - 11
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Other Relevant Precautions • Water Leakage Detection A water-leakage detector is not provided with this equipment. Water leakage may be caused by corrosion and cracks along the water flow system developed by changes in cooling-water quality and pressure. If a cooling-water circulating system is not installed, you should install a water-supply kit; the water-supply kit is provided with a pressure- reducing valve and a water-leakage sensor, preventing an accident of water pooling. • Thir
