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INSTRUCTION MANUAL
FOR
MODEL S-3400N
SCANNING ELECTRON MICROSCOPE
(User’s Operation/Maintenance Edition)
Please read through this manual carefully
before using the instrument.
Before using the instrument, read the safety
instructions and precautions carefully.
Keep this manual in a safe place nearby so it
can be referred to whenever needed.
Hitachi Science Systems, Ltd.
Copyright C Hitachi Science Systems, Ltd. 2004.
All rights reserved. Printed in Japan. Pa
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NOTICE: 1. Information contained in this document is subject to change without notice for improvement. 2. This manual is copyrighted by Hitachi High-Technologies Corporation with all rights reserved. No part of this manual may be reproduced, transmitted or disclosed to a third party in any form or by any means without the express written permission of Hitachi High-Technologies Corporation. 3. Hitachi High-Technologies Corporation assumes no liability f
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FOREWORD APPLICATION The S-3400N SEM utilizes an electron beam accelerated at 300V to 30kV. The instrument is designed mainly for observation and evaluation of specimens prepared for the SEM. Note that Hitachi Science Systems, Ltd. will not be responsible for injury or damage caused by usage of the instrument in a manner not described in this manual. CAUTION The electron microscope need not conform to the “Radiation Hazard Preventive Laws” or “Ionizing Radiation Hazard Preventiv
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Before using the equipment, read this instruction manual and pertinent instruction manuals of relevant accessories to assure proper operation of the equipment. Scope of Instruction Manual This instruction manual comprises the following: 1. Installation (Requirements and Items to be prepared by User) 2. Function (Description of Controls) 3. Operation (Viewing Images, Saving Data, and Taking Photographs) 4. Maintenance (Procedures, Troubleshooting, and Action on Power Failure) 5
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GUARANTEE Period of Guarantee The charge-free guarantee period is one year from the date of installation. Details of Guarantee (a) The instrument will be repaired free of charge if it malfunctions due to a defect in manufacture within the charge-free guarantee period. (b) Note that a substitute part may be used for repair, or replacement with an equivalent product may be made instead of repair. (c) Such system components as a personal computer and printer which are frequently mo
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GUARANTEE (i) Failure of instrument or damage of basic software, application software or other data due to a computer virus. (j) Failure of the PC used with the instrument or damage to basic software, application software and/or data because of momentary voltage drop caused by lightning or power interruption. (k) Failure of the PC used with the instrument or damage to basic software, application software and/or data caused by turning off the PC main power without taking the normal
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INSTALLATION AND AFTER-SALES SERVICE Installation Only the persons who have been trained by a certified engineer of the manufacturer are allowed to carry out the installation work Before installation, refer to section 1 and prepare the necessary utilities. Installation at another place after delivery will be provided at charge. Consult your nearest Hitachi service representative for details. After-sales Service For after-sales service of the instrument, contact the Hita
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Available Training Programs Hitachi service offers various kinds of training programs at its own facilities or at the user's site and facilities to ensure proper and safe operations of the equipment to its full performance. Please contact your sales representative about the details of the training programs and application to them. Applicants will be charged. Handling of Chemicals (1) The user is responsible for proper handling and disposal of chemicals used for cleaning of t
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For Safe Handling For Safe Handling Before operating the machine, read the following instructions carefully. Safety precautions are indicated with the following headings combining the alert symbol , words “Danger”, “Warning”, and “Caution”, and heading words: : This safety alert symbol calls the user’s attention to a danger that can potentially be injurious to people. To avoid the hazard, or even death, that can occur, all safety messages following the symbol must be h
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For Safe Handling General Precautions on Safety Before Using the System ■ Before using this product, read the operating manual careful and be sure to understand its contents. ■ The operating manual should be kept in a safe place near you for ready access and reference. ■ The system should be handled according to the procedures given in this manual. ■ Be sure to understand the safety-related instructions provided in this manual and heed them. ■ Be sure to observe the precaution
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For Safe Handling General Precautions on Safety (cont’d) Precautions on Using the System ■ When leaving the system unattended, turn off the acceleration voltage. ■ If abnormal conditions arise when the system is being used, such as abnormal noise, noxious odor, fumes, or gas leakage, immediately shut off the power, shut the master gas valve, and take any other safety measures that the situation may dictate, and call the HS Service Department. Precautions in Installation, Ma
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For Safe Handling Warnings in the Operating Manual Warnings provided in this manual and where they occur are summarized below. ● This system does not have components that require Danger signs. Warning Indicators ● Burns from the Rotary Pump ■ If it stops abnormally the rotary pump remains hot. Touching it can cause burns. Do not touch the rotary pump in the event of an abnormal stoppage. (Chapter 4 Maintenance) ● Burns from Touching the Filament Assembly ■
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For Safe Handling Warning Indicators (cont’d) ● Injury from Splashing Compressor Drain ■ The inside of the compressor tank is pressurized. When draining off the compressor, jerky motion can cause the liquid to splash, causing eye injuries. When draining off the compressor, do not stand directly in front of the drain. Turn the drain cock slowly. (Chapter 4 Maintenance) SAFETY - 5
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For Safe Handling Caution Indicators ● Fatigue due to Long Hours of Operation ■ In operating the system while viewing the display, looking at the display for long hours at the same posture can build up fatigue in the eyes or body. For your health, when operating the system for long hours, take a break 10 to 15 minutes every hour or so to rest your eyes and body. (Chapter 3 Operation) ● Injury from Lifting Heavy Objects ■ The goniometer (stage) is a heavy object. Removin
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For Safe Handling Caution Indicators (cont’d) ● Burns from Touching the Heated Aperture Plates ■ Heated aperture plates after baking are hot. Touching it can cause burns. Do not touch the heated aperture plates heated with bare hands. (Chapter 4 Maintenance) SAFETY - 7
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For Safe Handling System Warning Labels Safety pages 7 to 10 show Warning labels that are affixed to the S-3400N. The contents of the warning labels should be checked against the actual equipment. Warning labels should be checked, cleaned, and maintained from time to time so that they are clearly visible from a safe distance. If warning labels fade and become difficult to read due to aging, call the nearest Service Department for replacement. (Front view) (Left si
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For Safe Handling （Right side view） (Rear view) Warning Label Pasting Locations on System Unit SAFETY - 9
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For Safe Handling Warning Labels Pasting Locations on Rotary Pump Motion shielding weight Compressor （Top view） (Back view） Warning Label Pasting Locations on Weight/Compressor SAFETY - 10
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For Safe Handling SAFETY - 11 (Front view) (Left side view) Warning Label Pasting Locations Display Unit
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For Safe Handling Precautions for Proper Operation ― Precautions for the Proper Operation of the S-3400N ― About Electricity (a) Single-phase AC 100 V(±10%), 50/60 Hz, 2 kVA (for main unit).When the supplied power line voltage is 100 V, the instrument works by direct connection. When the supplied power line voltage is other than 100 V (200 V or others), use a step down transformer to step the power line voltage down to 100 V. Refer to Chapter 1 (Specifications and Installation
